Semiconductor Equipment Repair · Retrofit · Parts

We solve equipment problems when others can’t

From main controllers and legacy software to precision parts and mechanisms, MR SemiTech keeps your semiconductor tools running, upgraded and supportable — hardware and software under one roof.

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  • 20+Years serving semiconductor fabs
  • ISO 9001Certified quality system
  • HW + SWOne partner, full scope

About Us

Two specialists, one complete solution

MR SemiTech LLC is a partnership between Measure Co., Ltd. and Richtung Technology. Together we cover the full life of semiconductor equipment — mechanical parts, process hardware, control electronics and software — so you have a single partner for repair, retrofit and upgrade.

M

Measure Co., Ltd.

美驅有限公司 · Hsinchu, Taiwan

Precision parts manufacturing and equipment engineering. Rooted in Y.S. Industrial (since 1988) and established in 2008, Measure has dedicated equipment and parts-manufacturing departments and an ISO 9001:2015 certified quality system.

  • Second-source precision parts (metal & plastic)
  • Mechanism repair, refurbishment & coating
  • Process equipment: cleaners, ovens, N2 cabinets
  • Precision measurement & material analysis
R

Richtung Technology

Controls & Software Specialists

The “Black Jack” doctors of industrial equipment. Richtung repairs and upgrades semiconductor equipment main controllers when others can’t, and builds custom software that extends equipment lifespan.

  • Main controller repair, backup & upgrade
  • Circuit board & workstation repair
  • Legacy system retrofit & rescue
  • Custom software & data integration

Our Services

Hardware & software services for semiconductor equipment

Controls, Electronics & Software

Main Controller Repair & Upgrade

Diagnose and fix critical equipment controllers, build backup controllers to avoid production interruptions, and upgrade them for better performance.

Circuit Board Repair

Component-level repair of equipment circuit boards to restore function and extend equipment lifespan.

Legacy System Retrofit & Rescue

Recover and modernize legacy systems facing obsolescence from OEM discontinuation or lack of support, including complete system restoration.

Workstation Maintenance

Keep production workstations and equipment computers operating flawlessly.

Custom Software Solutions

Camera interface conversion, measurement data conversion, automated backup systems and command translation software tailored to your tools.

Automation & Data Integration

Data conversion and integration software that connects equipment seamlessly with your factory systems.

Mechanical, Parts & Process Equipment

Second-Source Precision Parts

Reverse-engineered replacement parts in metal, engineering plastics and metal/plastic assemblies, backed by material analysis and full dimensional inspection.

Mechanism Repair & Inspection

Repair, refurbishment and inspection of equipment mechanisms such as wafer spin bases, with documented before/after results.

Coating & Surface Treatment

Coating of chamber components such as RF shields, with controlled film thickness and certified materials.

Process Equipment

Design and build of ultrasonic cleaners, industrial ovens and N2 storage cabinets for fab and parts-cleaning use.

Custom Design, Jigs & Fixtures

Custom mechanical design of jigs, fixtures, tools and acrylic covers built to your requirements.

Precision Measurement & Analysis

Image dimension measurement, 2D/3D measurement, finite element analysis (FEA) and FTIR spectroscopy for engineering decisions.

Equipment & Parts

Built in-house, made to your spec

Twin-tank ultrasonic cleaner
Ultrasonic Cleaner (Twin)Twin-tank cleaning station with leak detection and level control
Industrial oven
Industrial OvenDual-chamber oven with N2 inlet, EMO and optional light tower
N2 storage cabinet
N2 Storage CabinetNitrogen-purged storage for wafers and sensitive parts
Precision metal parts
Precision Metal & Plastic PartsSecond-source components for semiconductor equipment
Custom jigs and fixtures
Custom Jigs & FixturesDesigned and machined to customer requirements

Success Stories

Proven in leading fabs

Controls

Backup Controller Replacements

Built backup critical controllers to avoid production interruptions for TSMC, UMC, GWS, FST, MXIC, SEHTWN and more.

Electronics

Circuit Board Repairs

Extended equipment lifespan through specialized circuit board repairs at TSMC, FST, URE and more.

Software

Automation & Data Conversion

Developed data conversion software for seamless system integration for TSMC, Vishay, BOE (China) and more.

Software

Legacy System Retrofit & Rescue

Recovered legacy systems facing obsolescence due to OEM discontinuation and lack of support at TSMC, PSMC and more; complete system restoration for TSMC and SDI (USA).

Refurbished SU3100 spin base
Mechanical

SU3100 Spin Base Repair

Repaired and refurbished spin base mechanisms with new Viton O-rings and redesigned components, documented with new 2D drawings.

Coating thickness measurement on RF shield
Mechanical

ASM XP8 RF Shield Coating

Robotic spray coating of RF shields with film thickness controlled to 200–250 µm, verified by coating thickness gauge and backed by material certification.

Experience with

  • TSMC
  • UMC
  • PSMC
  • MXIC
  • GWS
  • FST
  • SEHTWN
  • Vishay
  • BOE
  • URE
  • SDI (USA)

Quality

A disciplined process for second-source parts

Our ISO 9001:2015 certified quality system covers every replacement part from analysis to delivery.

  1. 01

    Material Analysis

    Verified through SGS and ITRI certified testing.

  2. 02

    Dimension Modeling

    2D/3D measuring instruments and optical projection.

  3. 03

    Sourcing & Process Planning

    Raw material sourcing, quotation and machining process confirmation.

  4. 04

    Manufacturing

    Precision machining of metal and plastic components.

  5. 05

    Dimensional & Functional QC

    Every part is checked for form and function.

  6. 06

    Surface Cleaning

    Chromate and ultrasonic cleaning.

  7. 07

    Assembly & Final Inspection

    Assembled and inspected before shipment.

  8. 08

    Packaging

    Packed to protect cleanliness and precision.

ISO 9001:2015Quality Management System
SGS · ITRIMaterial analysis & certification
FEA · FTIRStructural & spectral analysis
Image MeasurementPrecision dimensional inspection

Why MR SemiTech

Smarter than replacing, better than repairing

Innovative Solutions

Customized approaches to complex technical challenges.

Efficient & Reliable

Fast, precise technical support for seamless production.

Professional Team

Experts in mechanical, hardware, control systems and software engineering.

Industry Experience

20+ years of collaboration with major semiconductor manufacturers.

Contact Us

Let’s talk about your equipment

Tell us about your tool and the problem you need solved. Our engineers will get back to you promptly.

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